• TILT STAGE
•Tilt resolution – 1.4 arcsec
•Tilt Position repeatability 1.4 arcsec
•Tilt position
stability <<1.4 arcsec
•
• TRANSPORT
STAGE
•Position repeatability +/-0.030 in x,y in
•Position repeatability +/-0.0005 in z
•Position stability -+/- 10 arcsec