| Flexure |
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| • | Slider
2 (mirror, direct imaging) |
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| – | X=9
px pk-pk, y=14 px pk-pk |
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| • | Slider
3 (grating) |
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| – | X=20
px pk-pk, y=13 px pk-pk |
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| • | Slider
4 (grating) |
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| – | X=16
px pk-pk, y=9 px pk-pk |
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| • | Slider
3 was predicted by FEA to be the worst case |
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| • | Marked
hysteresis is present depending on PA rotation |
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| direction;
working FC system is needed |
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| • | Capture
range of FC system (from actual tests) |
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| – | X=26
px pk-pk, y=21 px pk-pk |
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