| Component | Requirements * |
|---|---|
| Motor: None | - |
| Gearbox: None | - |
| Limits **: Hard stops w/ decellerators, both ends. Magnetic reed switches each end | - |
| Fiducials: None | - |
| Encoders: Microswitch DT 2RV22-A7 for detecting mask insertion | - |
| Air Cylinders: Bimba UGS-1231-T | Air pressure T&D |
| Air Solenoids: Skinner latching solenoid | - |
| Lock/Clamp/Brake: None | - |
| Interlocks: See interlock schedule | - |
* Speed, temperature, accuracies, electrical power, pressurized
air, lubricant, coolant, N2 purge, ...
** Primary (soft) and secondary (hard) limits. These can
be magnetic, optical, or physical contact
NOTES:
| Distance from "home" * | Position | Primary Encoder Counts | Aux Encoder Counts | Physical Units | Time to Reach |
|---|---|---|---|---|---|
| Primary (soft) Limits: | Forward | - | - | - | - |
| Reverse | - | - | - | - | |
| Secondary (hard) Limits: | Forward | - | - | - | - |
| Reverse | - | - | - | - | |
| Position # | Index | - | - | - | - |
| 0 | - | - | - | - | |
| 1 | - | - | - | - | |
| 2 | - | - | - | - | |
| 3 | - | - | - | - | |
| 4 | - | - | - | - | |
| 5 | - | - | - | - | |
| 6 | - | - | - | - |
*"Coarse" if from optical interupter, "Fine" if from an encoder index pulse. Home is defined at index pulse on Aux. encoder if so equiped, otherwise at optical fiducial.
| Encoder | Counts/Inch | Counts/Millimeter | Counts/Degree |
|---|---|---|---|
| Primary | - | - | - |
| Auxiliary | - | - | - |
Mechanical Drawing(s) #
Electronic Drawing(s) #
Sign conventions are such that a positive motion of the motor turns the motor in a CW direction as viewed from the drive shaft looking back into the motor, and will the drive the stage towards the forward limit.